Research of Relative Sensitivity Factors by Using Glow Discharge Mass Spectrometry

KeyWord:glow discharge mass spectrometry(GDMS)  relative sensitivity factors  quantitative analysis  matrix effect

Abstract:

      As a powerful tool for the analysis of high pure metal and semiconductor£¬glow discharge mass spectrometry(GDMS) has been extended applied in China.The primary theory and application of GDMS were simply introduced and the instrumental conditions£¬measurement repeatability and series certified reference materials with different metallic matrix were researched in detail.The measured repeatabilities of analysis results were in the range of 1%-5% for the impurities which the contents were about 1 mg/kg. The series of certified reference materials of steel£¬copper£¬including SRM1761a,SRM1762a£¬SRM1763a£¬SRM1764a£¬SRM1765£¬SRM1766£¬SRM1767£¬SRM1767£¬SRM1112-SRMC1117 and SRM1256b purchased from National Institute of Standards and technology(NIST) of USA£¬were investigated and the results were compared.It was found that the same correction factors could be used in the measurement of impurities with similar matrix in a wide range of contents under the same measurement conditions.The correlation coefficients of series results were more than 0.999.It was found that there were obvious matrix effects in the measurements of samples with different matrixes.The routine instrumental values of some relative sensitivity factors(RSFs)£¬especially for the elements of lighter mass number£¬were not suitable for the quantitative analysis,but it is enough for the semi-quantitative analysis because the differences were no more than double of the RSFs.The result indicated that the correction of RSFs was the key technique for the measurement traceability through the research of the quantitative analysis by GDMS spectrometry.